Simpler dealing with and quicker outcomes
Leak exams are important in semiconductor factories and within the manufacture of photo voltaic cells and flat panel shows. Figuring out the smallest leaks with helium leak detection is vital for sustaining the required purity, avoiding defects and finally for product high quality. To boost the UL household of leak testers, INFICON has subsequently launched the three clever additions SMART-Spray, I·BOOST and SPRAY-Examine. The specialist in measurement expertise, sensor expertise and management software program thus ensures simpler dealing with, quicker response instances, shorter check cycles and extra dependable measurement outcomes.
SMART-Spray: quick, easy and dependable
INFICON is providing a brand new helium spray gun with the SMART-Spray. The hose-bound dealing with of enormous helium cylinders and the error-prone adjustment of the spray quantity are a factor of the previous with SMART-Spray. “The useful machine, which is designed for over 1,000 sprays per helium filling, replaces a distant management and combines its capabilities with these of a guide helium spray gun,” says Product Supervisor Markus Schwambera, summarising the benefits. Geared up with an illuminated color show, it makes leak detection on complicated semiconductor programs with many check factors and potential leaks simpler. These purposes are characterised by restrict leak charges of lower than 1 x 10-9 mbar x l/s. In these purposes, the battery-operated, moveable machine makes leak testing extra versatile, easier and extra environment friendly.
I·BOOST: brief response time, exact measurement consequence
With the sign processing filter I·BOOST software program replace, INFICON accelerates the leak fee sign. This shortens the response and check instances, particularly for the UL3000 Fab and UL6000 Fab collection, as a result of the check factors could be sprayed at shorter intervals. “The underside line is that this leads to a time saving as much as 50 % in leak detection in all measuring ranges,” says Product Supervisor Markus Schwambera, outlining the leap in effectivity. “Customers who buy the licence obtain quicker and extra exact measurement outcomes for various chamber volumes,” assures Schwambera. The advantages of I·BOOST are additionally notably efficient in complicated semiconductor programs. “The decrease the restrict leakagerates, the longer the check cycles often take – and that is the place the upper sensitivity and time financial savings of I·BOOST have the best influence,” argues Schwambera.
SPRAY-Examine: straightforward to put in check leak
With the SPRAY-Examine, INFICON gives an easy-to-install check leak. “The instrument is predicated on quartz home windows which can be solely permeable to gentle gases similar to helium and hydrogen. This will increase security and extends the performance of leak detection,” explains Markus Schwambera. SPRAY-Examine permits the measurement set-up and check methodology to be checked within the related leak fee vary. It will also be connected on to the system to hold out dead-time checks. “Typically a sure period of time elapses between the spray shot and the indication on the show,” says Markus Schwambera. This permits customers to higher estimate how lengthy the pause between spraying factors ought to final in order that potential leaks could be clearly assigned. The exclusion process applies: If there isn’t a indication after the useless time has elapsed, there isn’t a leak. “As a result of SPRAY-Examine is impermeable to gases which can be dangerous to the method, similar to water or oxygen, it might probably additionally stay mounted on the semiconductor system,” explains the product supervisor. Vital areas of software are programs with restrict leakage charges beneath 10-9 mbar x l/s.
These good necessities can be found worldwide
SMART-Spray, I·BOOST and SPRAY-Examine are appropriate for all cell INFICON helium leak detectors of the UL household, whereby I·BOOST is restricted to the newest technology of UL gadgets (UL3000 Fab/UL6000 Fab collection). The UL6000 Fab is probably the most highly effective and greatest machine in the marketplace for bigger check volumes in trendy semiconductor factories and coating programs with very giant chamber volumes. It gives the quickest response instances and shortest check instances in all measuring ranges. Its compact design makes it straightforward to maneuver even in tight areas. The UL3000 Fab collection was additionally developed for leak detection in semiconductor factories. “It’s characterised by flexibility, mobility, quick commissioning and excessive sensitivity. Customers additionally obtain their exact check outcomes in a short time” and are the usual in trendy semiconductor factories,” emphasises Product Supervisor Markus Schwambera. The UL3000 Fab additionally requires solely a small footprint and could be simply and maneuvered by means of slender areas. The UL1000 Fab collection covers a variety of purposes in relation to economical helium vacuum leak exams in industrial or semiconductor environments – particularly for smaller chamber volumes. The primary benefits: The machine could be very highly effective, sturdy and cheap to buy.